Low Dishing Cu CMP Slurries
for Advances Node Applications"
This study aimed to (i) investigate the effect of time between application and the first runoff event on the nutrient and microbial losses from land-applied manure slurries
, and (ii) determine how the nutrient loss in runoff varies with changes in solid content of the manure slurry product being applied.
This characteristic makes these slurries
suitable for extrusion as the action of passing through the syringe orifice subjects the slurry material to considerable shear stresses.
As the requirements for reduced levels of trace metal contaminants become more challenging for our customers, the demands placed on slurries
are becoming more stringent.
The long-term stability of colloidal silica-based slurries
(that utilize zircon or some alumino-silicates) is adversely affected by ions that can leach from the flours used.
Zurich-based Levitronix will be showcasing its line of bearingless pumps with a low shear force design for conveying slurries
to CMP processing without adding agglomeration.
Slurry Aging--In production, slurries
age, lose their usefulness and must be disposed.
Furthermore, Moyco contends that prior art, slurries
that were previously available which meet the patent specifications, will invalidate the patent.
KLEBOSOL[R] colloidal silica slurries
provide excellent process stability with low defect levels," said Asa Yamada, global slurry marketing director for Dow Electronic Materials.
This article presents the implementation of a polymer enhanced colloidal silica binder at Rolls-Royce and outlines the formulation and use of primary and secondary slurries
, including the results from volume testing.
The blanket purchase order and agreement provides that Nanophase will develop and supply to Moyco proprietary powder materials including nanometer-sized (billionths of a meter) alumina and ceria for purposes of manufacturing (CMP) chemical mechanical planarization (polishing) slurries
to be used by semiconductor manufacturers.
This passive, sonar-based technology enables measurements of single phase and multiphase fluids, as well as slurries
, with the same level of accuracy and performance.