Polygen(TM) Centura(R) and Polygen Centura 300 Systems Provide
introduces the Polygen Centura, its latest 200mm and 300mm systems for the deposition of polysilicon films, combining advanced CVD (chemical vapor deposition) processing technology with high productivity, low consumables cost and easy maintainability.
The new Polygen systems extend Applied Materials' technical superiority in polysilicon deposition while reducing operating cost, enabling it to compete directly with batch furnaces for mainstream poly applications," said Paul Meissner, general manager of Thermal Processing and Gate Products at Applied Materials.
The Polygen systems offer control of polysilicon grain size and orientation, enabling chip manufacturers to tailor dopant distribution according to device requirements.
The Polygen systems' robust chamber design, based on Applied Materials' production-proven xZ chamber architecture, enables controllable temperature uniformity for extremely uniform films.
For chipmakers that want to reduce cycle time in the fab, the Polygen system's short single-wafer processes can overcome the bottlenecks of long furnace process steps.