secondary ion mass spectrometry

(redirected from Spectrometry, mass, secondary ion)

secondary ion mass spectrometry

A technique of mass spectrometry in which a beam of energised ions (appoximately 5 keV in energy) is used to sputter sample atoms and molecules from a thin solid film or surface (classic SIMS), or organic molecules that may be present as a thin film or dissolved in a liquid or solid solution (molecular SIMS or liquid SIMS) held on the surface of a beam-intersecting sample probe.
Mentioned in ?