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lateral plane |
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This step is made on the lateral plane, only slightly up field. The patent includes use of the method for device isolation in the lateral plane of III-V semiconductor integrated circuits as well as for incorporation of buried layers of aluminum oxide insulator material into integrated electronic and optoelectronic device structures. A laser pointer secured parallel to the camera lens was used to ensure that the camera lens was pointed directly at the subject, so that the lens surface was parallel to the lateral plane of the subject and the workstation. |
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