Hundreds of other chemical reactions occur at the same time, complicating the etching
Figure 6c shows the effect of etching
this specimen with alkaline sodium picrate, which colors the large cementite brown.
These results strengthen the idea that hydrogen -- which links with silicon during etching
-- plays an important role in a wafer's optical properties, says Reuben T.
Some of the etchings
achieve the size of paintings, while some of the paintings are smaller than the largest etchings
Unfortunately, it is impossible to closely define etching
times, as the correct etch time and depth must be determined empirically and will vary with examination magnification.
Doan and Sailor also discovered that the etching
recreated the fine lines used as shading in the dollar bill.
process can turn a cheap lens into a high-performance optical element.
We selected Aviza for our deep silicon etching
because they were able to demonstrate the high aspect ratio features to meet our manufacturing requirements, while maintaining superior critical dimension (CD) control and uniformity.
The AdvantEdge Metal system helps customers extend aluminum interconnect technology below today's 90nm dimensions, with dramatically improved etching
precision and higher productivity," said Tom St.
We have been working with several types of high-K materials for many years and have unique, patented technology to address the many problems encountered in the etching
of these devices.
Introduced in 2003, the Applied Centura Enabler Etch system features a novel high-frequency source and decoupled plasma design to provide broad tunability for etching
the entire range of dielectric films used in the interconnect, including low k and FSG films.
The system offers short cycle time, versatility and high process performance in a small footprint for hydrophobic surface preparation, precision wet etching
, megasonic energy-assisted cleaning and nitride etch-back and stripping.