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particulate
(redirected from Solid aerosol)

   Also found in: Dictionary/thesaurus, Wikipedia 0.03 sec.
par·tic·u·late (pr-tky-lt, -lt, pär-)
adj.
Of or occurring in the form of fine particles.
n.
A particulate substance.

particulate
[pärtik′yəlit]
pertaining to a minute discrete particle or fragment of a substance or material.

particulate [pahr-tik´u-lāt]
composed of separate particles.

particulate
composed of separate particles.


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Eco-Snow and IMEC will assess the effectiveness of solid aerosol cleaning in conjunction with solvent-based, non-oxidizing wet chemistries in removing ion-implanted photoresist and post low-k etch resist in front- and back-end-of-line integrated device manufacturing process.
These offerings include solid aerosol cleaning for removing ion-implanted photoresist and for removing particles generated by etching.
 
 
 
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